Bridge configurations in piezoresistive two-axis accelerometers
نویسندگان
چکیده
منابع مشابه
Bridge configurations in piezoresistive two-axis accelerometers
In piezoresisitive two-axis accelerometers with two proof masses suspended by cantilever beams, there are generally many ways to configure the Wheatstone bridges. The configurations are different both with respect to functionality and performance. The main distinction is between bridges that contain resistors belonging to both proof masses, and the one bridge that doesn’t. We compare the differ...
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1996 ii The thesis of Brett Alan Warneke is approved. Figure 3-7 Cross-sectional diagram of an aluminum trace running between oxide plates and contacting a polysilicon piezoresistor. The oxide and first metal overetch into the silicon substrate causes the trace Figure 3-8 SEM of a Skeleton Crew accelerometer with bond wires providing 9.6 µgm of additional proof mass. The plate has been bent up ...
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Design, fabrication, and testing of multi-axis CMOS piezoresistive accelerometers is described. Vertical axis accelerometers have been fabricated in multiple processes using a production tested maskless bulk etch step. Horizontal axis accelerometers have also been fabricated and require an additional assembly step. Acceleration sensing in based on the piezoresistive behavior of the gate polysil...
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ژورنال
عنوان ژورنال: Analog Integrated Circuits and Signal Processing
سال: 2009
ISSN: 0925-1030,1573-1979
DOI: 10.1007/s10470-009-9280-3