Controlled Cathode Sputtering
نویسندگان
چکیده
منابع مشابه
Monte Carlo simulation of a sputtering hollow-cathode discharge for laser applications
We report on a kinetic model that computes the electron behaviour in a hollow cathode discharge. It is a part of the PLASIMO toolkit and is based on a Monte-Carlo technique. The model is tested by varying the input parameters and by comparing the output with the output obtained by the freeware Boltzmann equation solver BOLSIG+. The results show that the Monte-Carlo model gives reliable informat...
متن کامل1 Nitrogen atom energy distributions in a hollow - cathode planar sputtering magnetron
Energy distributions of N atoms in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 Å, well-separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of χw , was used to obtain the optimal deconvolved spectra. These showed nitrog...
متن کاملNitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron
Energy distributions of nitrogen atoms (N) in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 A, well separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of chi(2)(w), was used to obtain the optimal deconvolved spectra. Th...
متن کاملThe influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering
Titanium oxide nanoparticles have been synthesized via sputtering of a hollow cathode in an argon atmosphere. The influence of pressure and gas flow has been studied. Changing the pressure effects the nanoparticle size, increasing approximately proportional to the pressure squared. The influence of gas flow is dependent on the pressure. In the low pressure regime (107 ≤ p ≤ 143 Pa) the nanopart...
متن کاملPorous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries
We report the electrochemical performance of porous NASICON-type Li3Fe2(PO4)3 thin films to be used as a cathode for Li-ion microbatteries. Crystalline porous NASICON-type Li3Fe2(PO4)3 layers were obtained by radio frequency sputtering with an annealing treatment. The thin films were characterized by XRD, SEM, and electrochemical techniques. The chronoamperometry experiments showed that a disch...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Nature
سال: 1937
ISSN: 0028-0836,1476-4687
DOI: 10.1038/140067a0