Mechatronic design, actuator optimization, and control of a long stroke linear nano-positioner
نویسندگان
چکیده
منابع مشابه
Design and Development of a Two-axis Reluctance Based Actuator for Hexflex Nano-positioner Design and Development of Two-axis Reluctance Based Actuator for Hexflex Nano-positioner Acknowledgements
An endeavor was conducted to explore the design and development of a two-axis linear reluctance actuator for use as a part of a nano-positioner with the application of serving as a small scale kinematic coupling assembly station. This nano-positioner is designed to be able to accurately and repeatable provide precise motion control of small objects with a resolution on the nanometer scale. This...
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ژورنال
عنوان ژورنال: Precision Engineering
سال: 2018
ISSN: 0141-6359
DOI: 10.1016/j.precisioneng.2018.01.007