Operation of a sputter ion pump with graphite cathodes in ultrahigh vacuum.
نویسندگان
چکیده
منابع مشابه
Sputter-ion Pumps
The following paper outlines the working principles of sputter-ion pumps. The pumping mechanisms for reactive and inert gas species, as well as argon instability are explained. The operating pressure range, special designs for integrated linear pumps in accelerators and operational aspects are discussed.
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ژورنال
عنوان ژورنال: SHINKU
سال: 1990
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.33.176