Plasma ion source for in situ ion bombardment in a soft x-ray magnetic scattering diffractometer
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چکیده
منابع مشابه
Plasma ion source for in situ ion bombardment in a soft x-ray magnetic scattering diffractometer.
A new plasma ion source for in situ keV He ion bombardment of solid state samples or thin films was designed and built for ion fluences between 1 × 10(12) and 1 × 10(17) ions/cm(2). The system was designed to be mounted to different diffraction chambers for soft x-ray resonant magnetic scattering. Without breaking the vacuum due to He-ion bombardment, structural and magnetic modifications of th...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2012
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4718937