Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions
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چکیده
منابع مشابه
Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions
This review summarizes relevant research in the field of electrostatically actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical interactions as well as studies of mechanically or electrically induced effects are covered. An e...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2018
ISSN: 2190-4286
DOI: 10.3762/bjnano.9.29