Some Design Considerations on the Electrostatically Actuated Fixed-Fixed End Type MEMS Switches
نویسندگان
چکیده
منابع مشابه
Some Design Considerations on the Electrostatically Actuated Fixed-Fixed End Type MEMS Switches
The nonlinear electrostatic pull-in behaviour of MEMS Switches in micro-electromechanical systems (MEMS) is investigated in this article. We used the distributed model when the electrostatic pressure didn’t apply at the whole of the beam and applied only in the mid-part of the beam. In this part the electrostatic area is different from two other parts. The model uses Euler-Bernoulli beam theory...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/029