Active Compliant Fixtures for Nanomanufacturing
نویسندگان
چکیده
Kartik Mangudi Varadarajan Massachusetts Institute of Technology Department of Mechanical Engineering 77 Massachusetts Avenue, Room 3-446 Cambridge, MA 02139 Tel: 617-452-4957, [email protected] Martin L. Culpepper Massachusetts Institute of Technology Department of Mechanical Engineering 77 Massachusetts Avenue, Room 3-449b Cambridge, MA 02139 Tel: 617-452-2359, [email protected]
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