Due to the position-dependent nature of electrostatic forces, many microelectromechanical (MEM) oscillators inherently feature parametric excitation. This work considers the nonlinear response of one such oscillator, which is electrostatically actuated via non-interdigitated comb drives. Unlike other parametricallyexcited systems, which feature only linear parametric excitation in their equatio...

The authors present an efficient approach to evaluate the large-signal (LS) parametric sensitivity of active semiconductor devices under quasi-periodic operation through accurate, multidimensional physics-based models. The proposed technique exploits efficient intermediate mathematical models to perform the link between physics-based analysis and circuit-oriented simulations, and only requires ...