We seek the first indications that a nanoelectromechanical system (NEMS) is entering the quantum domain as its mass and temperature are decreased. We find them by studying the transition from classical to quantum behavior of a driven nonlinear Duffing resonator. Numerical solutions of the equations of motion, operating in the bistable regime of the resonator, demonstrate that the quantum Wigner...

29 THE 4TH ANNUAL IEEE INTERnational Conference on Nano/Microengineered Molecular Systems (IEEE-NEMS) was held at the Sheraton Dameisha Resort in Shenzhen, China, 5–8 January 2009. More than 300 papers were presented by leading micro/nanotechnology researchers in academia and industry from around the globe. Topical areas of the conference included microelectro mechanical systems (MEMS), BioMEMS...

Silicon carbide (SiC) remains the most promising semiconductor for developing harsh environment microsystems, particularly in applications where temperatures exceed 300 °C. While significant progress has been made in the development of more conventional junction field effect transistors (JFET), many challenges remain, particularly in the realization of robust digital logic circuits. The authors...

Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor approximately 20 zg. Our best mass resolution corresponds to approximately 7 zg, equivalent to approximately 30 xenon atoms or the mass of an individual 4 kDa molecule. Detailed analysis of the ultimate...

Mode interactions have recently become the focus of intense research in micro/nanoelectromechanical systems (M/NEMS) due to their ability improve device performance and explore frontiers fundamental physics. Understanding controlling coupling between vibrational modes are critical for development advanced M/NEMS devices. This review summarizes recent advances studies multiple resonators, focusi...

this article describes an accurate subpico flowmeter bifurcatedin to liquid and gas flowrates less than 1mol/s for both mems/nems and cryogenic technology applications. the mems/nems are described as either two gauges (instrument), or quartz fluctuating forks, even if the liquid or gas flows through an element, as well as cryogenic technology consisting of arrays of either parallel photonic cry...

A wealth of current research in microengineering aims at fabricating devices of increasing complexity, notably by (self-)assembling elementary components into heterogeneous functional systems. At the same time, a large body of robotic research called swarm robotics is concerned with the design and the control of large ensembles of robots of decreasing size and complexity. This paper describes t...

The Casimir-Lifshitz force originates from the quantum vacuum fluctuations of electromagnetic field. This is especially intense between interacting objects at nanoscale distances, and it can be attractive or repulsive depending on optical properties materials (amongst other parameters). fundamental phenomenon heart malfunctioning nano- micro-electromechanical devices (NEMS MEMS) that integrate ...