A Novel Low Cost Spring-Less RF MEMS Switch Prototype

This work reports on the fabrication process and measurements of a novel radio frequency microelectromechanical system (RF MEMS) capacitive shunt switch prototype with a mechanically unconstrained armature. The prototype is fabricated in a low cost process based on a printed circuit board (PCB) bonded to a glass slide. The minimum actuation voltage (Vact) of the prototype is 93V, with a switching time taken from the down to up state (Trise) and from the up to down state (Tfall) of 105ms and 26ms respectively. © 2009 Published by Elsevier Ltd.