In present study, the third-order shear deformation theory has been developed to investigate vibration analysis of FG Nano-plates based on Eringen nonlocal elasticity theory. The materials distribution regarding to the thickness of Nano-plate has been considered based on two different models of power function and exponential function. All equations governing on the vibration of FG Nano-plate have been derived from Hamilton’s principle. It has been also obtained the analytical solution for natural frequencies and corresponding mode shapes of simply supported FG Nano-plates. In addition, the general form of stiffness and mass matrix elements has been expressed based on this theory. The effect of different parameters such as power and exponential indexes of targeted function , nonlocal parameter of Nano-plate, aspect ratio and thickness to length ratio of Nano-plate on non-dimensional natural frequencies of free vibration responses have been investigated. The obtained analytical results show an excellent agreement with other available solutions of previous studies. The formulation and analytical results obtained from proposed method can be used as a benchmark for further studies to develop this area of research.