Kheirolahi Hossein Abadi, Mehdi

[ 1 ] - Four-wire orthogonal structure for accurate measurement of fluid velocity and wind flow direction using silicon micro-machining on silicon nitride membranes

Microelectromechanical thermal sensors are one of the most accurate and important tools for measuring the direction and velocity of an acoustic wave and winds. Detection of wind direction and speed in different ranges has different applications such as meteorology, wind power plants, gas flow measurement in smart building and gas consumption of power plants. In this paper, a four wires sensor i...