Chemically amplified resists provide some trade-off between resolution and amplification. While it is necessary for a single photogenerated acid to be mobile enough to cause several deprotection reactions, this inevitably leads to some linewidth spread. An acid molecule mobile enough to travel to several reaction sites is also mobile enough to move into unexposed regions of the resist. In order...

Bi-layer lift-off metallization techniques offer significant advantages in resolution, removal, process simplicity, undercut control and yield over conventional single-layer lift-off processes. Because of its ease of application, long shelf life and lower tool cost, the polydimethylglutarimide (PMGI) bi-layer process has become an attractive method for the metallization of III-V compound semico...

This paper describes details of NTOU Chinese spelling check system in SIGHAN-8 Bakeoff. Besides the basic architecture of the previous system participating in last two CSC tasks, three new preference rules were proposed to deal with Simplified Chinese characters, variants, sentence-final particles, and DE-particles. A new sentence likelihood function was proposed based on frequencies of space-r...

This paper describes details of NTOU Chinese spelling check system participating in SIGHAN-7 Bakeoff. The modules in our system include word segmentation, N-gram model probability estimation, similar character replacement, and filtering rules. Three dry runs and three formal runs were submitted, and the best one was created by bigram probability comparison without applying preference and filter...