In this study, the resonance-frequency dependence and modal sensitivity of flexural vibration modes overhang/T-shaped microcantilevers to interaction force surface stiffness variations were analysed, a closed-form expression was derived. The Euler–Bernoulli beam theory used develop models, characteristic formula representing cantilever frequencies on overhang dimensions obtained. results derive...

Power supply is a bottle-neck problem of wireless micro-sensors, especially where the replacement of batteries is impossible or inconvenient. Now piezoelectric material is being used to harvest vibration energy for self-powered sensors. However, the geometry of a piezoelectric cantilever beam will greatly affect its vibration energy harvesting ability. This paper deduces a remarkably precise an...

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We show that standard silicon nitride cantilevers can be used for tapping mode atomic force microscopy (AFM) in air, provided that the energy of the oscillating cantilever is sufficiently high to overcome the adhesion of the water layer. The same cantilevers are successfully used for tapping mode AFhif in liquid. Acoustic modes in the liquid excite the canti1eve.r. On soft samples, e.g., biolog...

Piezoresponse forcemicroscopy (PFM) and related bias-induced strain sensing atomic force microscopy techniques provide unique characterization ofmaterial-functionality at the nanoscale. However, these techniques are prone to unwanted artifact signals that influence the vibration amplitude of the detecting cantilever. Here, we show that higher-order contact resonance eigenmodes can be readily ex...

Piezoresistors are commonly used in microsystems for transducing force, displacement, pressure and acceleration. Silicon piezoresistors can be fabricated using ion implantation, diffusion or epitaxy and are widely used for their low cost and electronic readout. However, the design of piezoresistive cantilevers is complicated by coupling between design parameters as well as fabrication and appli...

In this paper we present a mathematical model for the dynamics of an electrostatically actuated micro-cantilever. For the common case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are those of a periodic system described by a Mathieu equation. We present experimental results that confirm the validity of the model, and in particular illustrate that...

Parallel frequency readout of an array of cantilevers is demonstrated using optical beam deflection with a single laser-diode pair. Multi-frequency addressing makes the individual nanomechanical response of each cantilever distinguishable within the received signal. Addressing is accomplished by exciting the array with the sum of all cantilever resonant frequencies. This technique requires cons...