In this paper, a highly monolithic-integrated multi-modality sensor is proposed for intracorporeal monitoring. The single-chip sensor consists of a solid-state based temperature sensor, a capacitive based pressure sensor, and an electrochemical oxygen sensor with their respective interface application-specific integrated circuits (ASICs). The solid-state-based temperature sensor and the interfa...

Slow ground motion study for future accelerator projects and alignment of large accelerator machine components with high accuracy are important tasks now. One of the prevalent tool for solution of these tasks are Hydrostatic Level Sensors designed to work into the Hydrostatic Levelling System, which is based on principle of communicating vessels. All water level measuring sensors are linked to ...

Touch Sensing This is the detection and measurement of a contact force at a defined point. A touch sensor can also be restricted to binary information, namely touch, and no touch. Tactile Sensing This is the detection and measurement of the spatial distribution of forces perpendicular to a predetermined sensory area, and the subsequent interpretation of the spatial information. A tactile-sensin...

This paper describes a capacitive absolute-pressure sensor in which the sealed lead transfer is eliminated. The pick-off capacitance is between a flap or skirt-like extension of the flexible diaphragm that reaches past the sealed cavity, and an electrode patterned on the substrate directly below this extension. The sidewall of the cavity is relatively narrow and flexible. Finite-element analysi...

Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achieved by increasing the capacitance of the sensor using solid dielectric material while it deteriorates the flexibility. Using air as the dielectric...

A new interface circuit for capacitive sensor is presented. This paper presents the design and simulation of soil moisture capacitive sensor interface circuit based on phase differential technique. The circuit has been designed and fabricated using MIMOS’ 0.35μm CMOS technology. Simulation and test results show linear characteristic from 36 – 52 degree phase difference, representing 0 – 100% in...

A high sensitive CMOS Micro-electro-mechanical rectangular capacitive pressure sensor in SiGeMEMS process (Silicon Germanium Micro-electro-mechanical System process) is designed and analyzed. Polycrystalline Silicon Germanium (Poly-SiGe) having low fatigue and high strength is effectively used as the sensor diaphragm material to achieve better reliability. The designed perforated diaphragm clam...

Ab~fluct-Cuff electrode an important component of neural prostheseq has been developed and improved in many research groups It is well known that cuff electrode has the potential hazard of causing nerve in& by compression. The goal of this study is to design a spiral cuff electrode witkmbedded micr &pressure sensor by using g i c r 0-glectr @mechanical system (MEMS) technologies. The pressure s...