The effect of a sacrificial layer residue on a cantilever beam in the nano-electro-mechanical nonvolatile memory is investigated for the optimization of reliability characteristics. Different from previous research, pull in voltage model of nano-electro-mechanical nonvolatile memory used triangular residue layer which is considered by real wet etching process. Modified pull in voltage model was...

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

This paper presents a comprehensive case study on electro-mechanical analysis of MEMS[1] variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of ...

in this paper, the numerical technique based on hybrid bernoulli and block-pulse functions has been developed to approximate the solution of system of linear volterra integral equations. system of volterra integral equations arose in many physical problems such as elastodynamic, quasi-static visco-elasticity and magneto-electro-elastic dynamic problems. these functions are formed by the hybridi...