Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical appl...

MEMS (micro-electro-mechanical-systems) device has been a promising and fascinating topic in both mechanical and electrical engineering domains for decades with the revolutionary contributions to the contemporary micro-scale instruments especially for the micro-actuator and micro-sensor. Among the versatile material foundation to build up the MEMS device, silicon wafer is preferred to due to th...

In this paper we study the use of pseudorandom test techniques for linear and nonlinear devices, in particular Micro Electro Mechanical Systems (MEMS). These test techniques lead to practical BuiltIn-Self-Test techniques (BIST). We will first present the pseudorandom test technique for Linear Time Invariant (LTI) systems. Next, we will illustrate and evaluate the application of these techniques...

In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...

We have proposed a unified approach to the modeling and study of developments in the field of MEMS and Nanotechnology and its application in futuristic Nano-enabled Cells. We have proposed a novel to approach reliability of MEMS enabled fuel cells. We know that reliability and accurate prediction of properties in nano domains remains a major challenge where still theories are being developed to...

We report a new approach for efficient computation of capacitance in multiconductor systems embedded in homogeneous or multiple dielectric media. The technique employs exponential expansion of the Green's function for evaluation of the three-dimensional potential and its gradient, enabling rapid and accurate extraction of interconnect capacitance in VLSI and large-area amorphous silicon electro...

The micromachining technology that emerged in the late 1980s is able to provide micron-sized sensors and actuators. These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electromechanical systems (MEMS) that can perform real-time distributed control. This capability opens up new territory for flow control research. On the other hand, surface e...

We report a MEMS (Micro-Electro-Mechanical Systems)-based microbial fuel cell (MFC) that produces a high power density. The MFC features 4.5-μL anode/cathode chambers defined by 20-μm-thick photo-definable polydimethylsiloxane (PDMS) films. The MFC uses a Geobacter-enriched mixed bacterial culture, anode-respiring bacteria (ARB) that produces a conductive biofilm matrix. The MEMS MFC generated ...

This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviat...