The present technology advancement in biomedical, micro-electro-mechanical systems (MEMS) engineering, bio-MEMS, healthcare, etc. is driving the need to fabricate devices with multi-level, high aspect ratio and complex microstructures which in turn requires high quality mold inserts with all these features. This research addressed fabrication challenges of a PMMA mold insert template containing...

Today many position aware devices are demanded. Micro-Electro-Mechanical Systems (MEMS) can detect their own acceleration. Out of these values the movement, and thus the new position, can be calculated. The problem of these systems is, they are very error-prone. In order to minimize the fault this paper introduces a new way of combining different MEMS measurements to achieve a more accurate rel...

We report design and fabrication process of MEMS (Micro Electro Mechanical Systems) actuators for a new type of optical switch integrated with photonic crystal (PhC) waveguides. Thin film poly-silicon electrostatic microactuator (either a cantilever or a bridge style) is placed over a PhC waveguide to induce optical modulation by means of mechanical motion in the evanescent fields. For low volt...

This paper presents Artificial Neural Network (ANN) implementation for Mechanical modeling of Radio Frequency Micro Electro Mechanical System (RF MEMS) lateral double beam switch. We propose an efficient approach based on ANN for analyzing the static and dynamic characteristics of RF MEMS lateral switch by calculating its characteristics parameters. ANN model were trained with five learning alg...

In this work, we study the local wellposedness of solution to a nonlinear elliptic-dispersive coupled system which serves as model for Micro-Electro-Mechanical System (MEMS). A simple electrostatically actuated MEMS capacitor device consists two parallel plates separated by gas-filled thin gap. The modelling combines linear elliptic equation gas pressure with semilinear dispersive gap width. We...

Micromachined microsystems and Micro Electro Mechanical Systems (MEMS) have made possible the development of highly accurate and portable sensors and instrument for a variety of applications in the health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated c...

Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator...

Optical MEMS have the potential to drastically reduce the size and cost of digital communications and computation systems. However, the multiple technologies (optical, electrical, and mechanical) utilized in optical MEM systems has led to new challenges in the creation of computer aided design tools for these systems. This paper presents a system level opto-electro-mechanical CAD tool, Chatoyan...

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...