The analysis of cantilever beams of small dimensions taking into the effect of fringing fields is studied and the parameters are estimated. Extracting the mechanical properties of MEMS devices has always been a challenge in terms of test time and test cost due to difficulties associated with accurate characterization of thin films. A technique for diagnosing the mechanical parameters of a canti...

This letter demonstrates the linear dynamic range enhancement of a mode-localized microelectromechanical systems sensor based on two weakly coupled cantilevers under electrostatic actuation resulting in repulsive force. An analytical model is proposed to design sensor, and expression force obtained using finite element simulation. Compared attractive actuation, intensity less sensitive change c...

Besides the scale factor that distinguishes the various spices fundamentally biological muscles changes little between species indicating a highly optimized system, Electroactive polymer actuators offer the closest resemblance to biological muscles however beside the large actuation displacement these materials are falling short with regards to the actuation force. As improved materials emergin...

A single-cell/single-particle microbeam has been designed in which the radiation source is a high specific-activity alpha-particle emitting radioisotope, rather than a particle accelerator. The source is imaged at the focal point of a compound magnetic lens array. A novel precision microscope stage with an extremely compact design is included with the endstation s locating, targeting and imagin...

We developed an 8.4-inch electrostatic-tactile touch display using a segmented-electrode array (30×20) as both tactile pixels and sensors. Each pixel can be excited independently so that the allows presenting real localized textures in any shape. A driving scheme which strength is independent of grounding state human body by employing two-phased actuation was also proposed demonstrated. Further...

In this paper, the oscillations of an actuated, simply supported microbeam are studied for which it is assumed that electric load composed a small DC polarization voltage and small, harmonic AC voltage. Bending stiffness mid-plane stretching taken into account as well viscous or structural damping. No tensile axial force to be present. By using multiple time-scales perturbation method, approxim...

By controlling the degrees of freedom for the components in the system and using a PWL solver, a tradeoff between speed and accuracy is realized. Electrical components are modeled using a similar MNA technique. The interaction between electrical and mechanical components is accomplished by modeling the coupled energy between the domains. In this paper we demonstrate the capabilities of our syst...