This article describes results obtained using various plasma and surface diagnostics in a study of inductively coupled fluorocarbon plasmas in which the amount of capacitive coupling was systematically varied. It is found that the plasma density decreases while the electron temperature increases as the amount of capacitive coupling is increased at a constant source power level. The rate at whic...

Improved detection efficiency and microdroplet sample introduction in single particle inductively coupled plasma mass spectrometry allow for accurate sizing counting of nanoparticles suspension at the digit nm scale.