In this paper a newly developed model for identification and simulation of dynamic phenomena in a thermal ink jet is presented. As a result of the modeling the calculation of the pressure propagation in the bubble is performed by identifying the mathematical model with position measurements of the ejected liquid column. The identification of the model has been performed by minimizing the sum of...

A microactuator technology utilizing magnetic thin films and polysilicon flexures is applied to torsional micro-structures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430x130x15 µm 3 nickel-iron plate attached to a pair of 400x2.2x2.2 µm 3 polysilicon ...

We describe the design of micropatterned surfaces for single cell studies, based on thermoresponsive polymer brushes. We show that brushes made of poly(N-isopropylacrylamide) grafted at high surface density display excellent protein and cell anti-adhesive properties. Such brushes are readily patterned at the micron scale via deep UV photolithography. A proper choice of the adhesive pattern shap...

Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of a more effec...

The magnetic shape memory (MSM) alloy Fe70Pd30 is of particular interest for novel microactuator and sensor applications. This review summarizes the underlying physical and material science concepts for this MSM alloy system. First-principles calculations of the electronic and crystallographic structure together with combinatorial and epitaxial film studies are presented. By these complementary...

This paper describes the principles, design, fabrication and performance of a new type of electromagnetic bistable MEMS relay. The microdevice is operated by a wiggling microactuator, which is symmetrically assembled with two integrated planar windings and one permanent rotor in the form of sandwich with coaxial sustained gaps between each other. The micromachined rotor moves to-and-fro around ...