This chapter serves as a brief introduction to the basic properties of silicon carbide (SiC) and the advantages of using SiC over other semiconductor materials for microelectromechanical systems (MEMS). Given the excellent and extensive review chapters that follow this one, I have confined this chapter to recent research performed at the University of Edinburgh in the area of SiC microelectrome...

The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type long-term favored device based on microelectromechanical system technology, piezoresistive sensor has become powerful measuring platform owing its simple operational principle, favorable sensitivity accuracy, mature fabrication, low cost...

Abstract We present a method to structure liquid crystal network actuators based on selectively polymerizing the without any physical or hard masks in process compatible with microelectromechanical system (MEMS) technology. The standard glass-cell filling technique is used generate actuator films; subsequently, selected areas are exposed light and thus polymerized actuators. No further machinin...

Abstract The rapid advent of the piezoelectric microelectromechanical systems (PiezoMEMS) field has created a tremendous demand for low hysteretic thin films on Si. In this work, we present integration epitaxial Pb(Mg 0.33 Nb 0.67 )O 3 -PbTiO (PMN-PT) with Si to enable device fabrication using state art methods. With optimized buffer layers and electronic contacts, high-quality PMN-PT are integ...

Several new generation memory devices have been developed to overcome the low performance of conventional silicon-based flash memory. In this study, we demonstrate a novel non-volatile memory design based on the electromechanical motion of a cantilever to provide fast charging and discharging of a floating-gate electrode. The operation is demonstrated by using an electromechanical metal cantile...

This paper contends to be the first to report the experimental observation of up to 28 orders of parametric resonance, which has thus far only been envisioned in the theoretical realm. While theory has long predicted the onset of n orders of parametric resonance, previously reported experimental observations have been limited up to about the first 5 orders. This is due to the rapid narrowing na...