نتایج جستجو برای: micromachining

تعداد نتایج: 1571  

2007
Ivo W. Rangelow

The aim of this work is to demonstrate the “dry” etching based micro-fabrication technologies in the manufacturing of Single Crystal Silicon (SCS) for Micro-Electro/(Optical)-Mechanical-Systems (ME(O)MS). The ME(O)MS technology is very fast growing industry branch based often on the same silicon technology as integrated circuits. The process of plasma-dry etching is quite simple straightforward...

2014
Manjot Singh Cheema Akshay Dvivedi Apurbba Kumar Sharma Sourav Acharya

The ability to fabricate complex structures and patterns at micron and nano level has facilitated use of many miniature devices in various applications. Fluid mixing is one of the major requirements in such microfluidic devices [1]. Efficient mixing of two and more fluids was made possible by development of 3 D microchannels [2, 3]. Effective mixing was observed due to chaotic advection. Furthe...

Journal: :Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 1997

Journal: :IEEJ Transactions on Sensors and Micromachines 2000

Journal: :Journal of Electrochemical Science and Engineering 2018

Journal: :The Journal of the Institute of Television Engineers of Japan 1996

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