We present an integrated thermoplastic elastomer (TPE) based multilayer microfluidic device with an embedded peristaltic micropump and through-holes membrane for high throughput particle sorting and separation. Fluidic and pneumatic layers of the device were fabricated using hot-embossing lithography and commercially available polycarbonate membranes were succcessfully sandwiched between two th...

A review of the state of the art in micropumping technologies for driving fluid through micro-channels is presented with a particular emphasis on small-scale cooling applications. An extensive variety of micropumping techniques developed over the past fifteen years in the literature is reviewed. The physical principles, engineering limitations, and advantages of approximately twenty different k...

This review presents an extensive overview of a large number of microvalve and micropump designs with great variability in performance and operation. The performance of a given design varies greatly depending on the particular assembly procedure and there is no standardized performance test against which all microvalves and micropumps can be compared. We present the designs with a historical pe...

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Wafer bonding techniques play a key role in the present day silicon bulk micromachining for MEMS based sensors and actuators. Various silicon wafer bonding techniques and their role on MEMS devices such as pressure sensors, accelerometers and micropump have been discussed. The results on the piezoresistive pressure sensors monolithically integrated with a MOSFET differential amplifier circuit h...

Micropumps are one product which was commercialized from Microsystem Industries. It has many applications and many potential as well, and due to this there is a growing interest in their modeling, simulation, and performance and this is going and in hand with research on their fabrication as well. In this paper, we are reviewing the basic aspects of modeling of micropump and their challenges. B...