Plasma-Assisted Deposition of TiO2 Nanomembranes In article number 2100767, Laura Montes, Carmen López-Santos, Ana Borrás, and co-workers develop nanofibers by soft-template plasma-enhanced chemical vapor deposition on porous substrates as cellulose filters metallic meshes. These 3D nanomembranes work microliter water/oil droplets filters, photoactive microfluidic valves, or self-cleaning surfa...

A condensed phase of zirconium monoxide (ZrO) was detected in YSZ (Zr0.92Y0.08O2-δ) coatings deposited using plasma spray-physical vapor deposition. The rapid cooling rate this process can result the condensation nonequilibrium states that be kinetically trapped coatings. columnar microstructure contained a mixture YSZ, ZrO2, and ZrO phases. expected to conductive based on density functional th...

In this work, molecular dynamics (MD) simulations were employed to investigate the effects of duty cycle changes and utilization of tantalum nitride interlayer on the surface roughness and adhesion of Ta coating deposited by pulsed-DC plasma assisted chemical vapor deposition. To examine the simulation results, some selected deposition conditions were experimentally implemented and characterize...

Optical Emission Spectroscopy and Rutherford Backscattering Spectrometry are combined to determine condensation coefficients for plasma sputtering deposition. The method is applied for palladium deposition onto various substrates and condensation coefficients are found to lie between 0.4 and 0.9. PACS numbers: 81.15.Cd, 52.77.Dq Submitted to: J. Phys. D: Appl. Phys. § Corresponding author: Fax ...

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