نتایج جستجو برای: sputter deposition
تعداد نتایج: 97899 فیلتر نتایج به سال:
The advent of new and sophisticated material growth processes (molecular beam epitaxy, chemical vapor deposition and ion sputter deposition-) has produced new exotic materials such as amorphous alloys and compositionally modulated structures [1]. The atomic level structure of these materials can be proved by techniques such as x-ray diffraction. The electrical and thermal transport properties a...
We have presented the kinetic study of the very initial growth stages of an ultra thin film (40Å-150Å) of Ag sputter-deposited on Si(001) substrate containing native oxide using grazing incidence x-ray reflectivity (GIXR) technique and Atomic Force Microscopy (AFM). We observe that the film consists of mounds with the presence of voids. The thickness 'd xray ' and the packing fraction 'η' of th...
Arc and glow discharges are defined based on their cathode processes. Arcs are characterized by collective electron emission, which can be stationary with hot cathodes (thermionic arcs), or nonstationary with cold cathodes (cathodic arcs). A brief review on cathodic arc properties serves as the starting point to better understand arcing phenomena in sputtering. Although arcing occurs in both me...
Tunnel magnetoresistance (TMR) devices were processed by sputter deposition of Co, Al and NiFe on oxidized Si wafers. After the Al deposition, an ex-situ oxidation in air at room temperature or an in-situ oxidation enhanced by ultraviolet (UV) irradiation in high purity oxygen at 100 mbar follows. The electrical and magnetic properties of the junctions are measured and discussed concerning spec...
Related Articles Room temperature deposition of alumina-doped zinc oxide on flexible substrates by direct pulsed laser recrystallization Appl. Phys. Lett. 100, 151902 (2012) Optimization of sputter deposition parameters for magnetostrictive Fe62Co19Ga19/Si(100) films J. Appl. Phys. 111, 07A939 (2012) Sign change in the organic magnetoresistance of tris(8-hydroxyquinolinato)aluminum upon anneali...
A simple yet versatile combinatorial method to discover binary metal nanoparticle catalysts was developed. In this method, the nominal thickness of component metals can be independently screened for a wide range by simply setting a mask with a slit above a substrate during sputter-deposition. Using this method, we prepared a catalyst library with Mo (0.2− 4 nm) and Co (0.2− 8 nm) thickness prof...
The application of either hydroxyapatite (HA) or titanium dioxide (TiO2) as coatings onto existing bioinert materials has been explored as the key route for enhancing the surface properties of hard tissue implant devices. However, it has been proposed that composite HA/TiO2 coatings may provide significant advantages for the application of such surfaces. This work reports on the surface propert...
Hydrogen doped In₂O₃ thin films were prepared by room temperature sputter deposition with the addition of H₂O to the sputter gas. By subsequent vacuum annealing, the films obtain high mobility up to 90 cm²/Vs. The films were analyzed in situ by X-ray photoelectron spectroscopy (XPS) and ex situ by X-ray diffraction (XRD), optical transmission and Hall effect measurements. Furthermore, we presen...
Regular arrays of TixSn1-xO2 nanoflakes were fabricated through glancing angle sputter deposition onto self-assembled close-packed arrays of 200-nm-diameter polystyrene spheres. The morphology of nanostructures could be controlled by simply adjusting the sputtering power of the Ti target. The reflectance measurements showed that the melon seed-shaped nanoflakes exhibited optimal properties of a...
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