We introduce a new class of siloxane-based epoxy polymers for thin film optical waveguide applications. The thickness of spun-on films can be controlled by varying either spin speed or viscosity using solvents. Cured films exhibit excellent adhesion to silicon oxide and Al and excellent thermal and chemical stability. Waveguides of ~ 2 micron thickness on silicon oxide exhibit <0.2 dB/cm loss a...

A novel approach based on the Poisson spot effect in a conventional optical lithography system is presented for fabricating large-scale ordered ring patterns at low cost, in which the pattern geometries are tuned by controlling the exposure dose and deliberate design of the mask patterns. Following this by cryogenic deep etching, the ring patterns are transferred into Si substrates, resulting i...

The control of lateral mode operation using a photonic crystal in a vertical-cavity surface-emitting laser ~VCSEL! is analyzed and confirmed experimentally. By controlling design parameters of the photonic crystal pattern, we have produced photonic crystal VCSELs that operate in higher order defect modes in addition to the fundamental defect mode. The transverse modal behavior is consistent wit...

Ultraviolet laser irradiation of a lithium niobate +z polar surface enables the production of ridge waveguides. Ultraviolet laser induced inhibition of poling is used to define an inverted domain pattern which transforms into a ridge structure by differential etching in Hydrofluoric acid. The laser irradiation step also induces a refractive index change that provides the vertical confinement wi...

The residual damage incurred to GaAs viaetching with a Cl,/Ar plasma generated by an electron cyclotron resonance (ECR) source was investigated as a function of variations in ion energy, ion flux, and etching temperature. The residual damage and electrical properties of GaAs were strongly influenced by changes in these etching parameters. Lattice damage was incurred in all processing situations...

A vertical-cavity surface-emitting laser with a two-dimensional photonic crystal ~PC! structure has been investigated for single lateral mode operation. The PC confined mode can be controlled by the lattice constant, the hole diameter, the etching depth, and the defect structure. A seven-point defect structure is proposed to enhance the confinement effect, which is diluted by finite hole depth ...

An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it...

The two-dimensional photonic crystal (2-D PhC) structure has been investigated as a method for lateral mode control of vertical-cavity surface-emitting lasers (VCSELs). The 2-D PhC structures were designed using an equivalent index model developed for photonic crystal fibers combined with a plane wave expansion method. The etching depth dependence of the PhC structure was incorporated for the f...