We review automation requirements and technologies for semiconductor manufacturing. We first discuss equipment integration architectures and control to meet automation requirements for modern fabs. We explain tool architectures and operational issues for modern integrated tools such as cluster tools, which combine several processing modules with wafer-handling robots. We then review recent prog...

Scintigraphic, clinical and pathological findings were correlated in 52 patients studied by technetium-99m stannous pyrophosphate ("mTc-PYP) myocardial scintigraphy before death or surgical resection of myocardium. Fifty-nine clinical events were studied with scintigraphy in the 52 patients; 41 of the 59 were associated with one or more abnormal "mTc-PYP studies and 18 with normal 9OmTc-PYP sci...