A novel MEMS device architecture: the SOI SGMOSFET, which combines a solid-state MOS transistor and a suspended metal membrane in a unique metal-over-gate architecture, is proposed. A unified physical analytical model (weak, moderate and strong inversions) is developed and used to investigate main electrostatic characteristics in order to provide first-order design criteria for low-voltage oper...

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the m...

In this paper, we study the behaviour of a microcantilever beam under electrostatic actuation using finite difference method. This problem has a lot of applications in MEMS based devices like accelerometers, switches and others. In this paper, we formulated the problem of a cantilever beam with proof mass at its end and carried out the finite difference solution. we studied the effects of lengt...

A mechanical and electrical transistor structure (METS) is proposed for effective voltage scaling. The sub-2 nm nanogap by atomic layer deposition (ALD) without stiction and the application of a dielectric with high-permittivity allowed the pull-in voltage of sub-2 V, showing the strength of the mechanical actuation that is hard to realize in a typical complementary metal-oxide-semiconductor (C...

A combination of experiment and theory shows that dielectric elastomers exhibit complex interplay of nonlinear processes. Membranes of a dielectric elastomer are prepared in various states of prestretches by using rigid clamps and mechanical forces. Upon actuation by voltage, some membranes form wrinkles followed by snap-through instability, others form wrinkles without the snap-through instabi...

Icing and stalling on the surfaces of aircraft wings endanger flight safety. The object this research is a nanosecond pulsed dielectric-barrier-discharge plasma actuation unit with distributed layout, aerodynamic performance wing under icing conditions improved by changing electrical parameters. Actuated low voltage frequency, acts as sensor to judge according change in high discharge severe ge...

In this research, a functionally graded microbeam bonded with piezoelectric layers is analyzed under electric force. Static and dynamic instability due to the electric actuation is studied because of its importance in micro electro mechanical systems, especially in micro switches. In order to prevent pull-in instability, two piezoelectric layers are used as sensor and actuator. A current amplif...

An optical fiber with nano-electromechanical functionality is presented. The fiber exhibits a suspended dual-core structure that allows for control of the optical properties via nanometer-range mechanical movements. We investigate electrostatic actuation achieved by applying a voltage to specially designed electrodes integrated in the cladding. Numerical and analytical calculations are preforme...

The paper deals with the mechanical behavior of a micro-beam bonded with two piezoelectric layers. The micro-beam is suspended over a fixed substrate and undergoes the both piezoelectric and electrostatic actuation. The piezoelectric layers are poled through the thickness and equipped with surface electrodes. The equation governing the micro-beam deflection under electrostatic pressure is deriv...