For the testing of micro electro-mechanical systems, we propose a taxonomy built-in self-testing methods. These solutions that are non-intrusive, cost-effective and typically non-intrusive during process being actively sought after as cost micro-electro-mechanical systems (MEMS) can account for 50% total end product. The selection methods is analyzed extensively, classification table such prese...

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effec...

An optical micro-electro-mechanical systems (MEMS) structure is provided. The structure includes an elastomer membrane, a plurality of polymer fibers attached to the elastomer membrane, an array of detectors operatively connected to the plurality of polymer fibers at a first end of the plurality of polymer fibers, and a microlens array operatively connected to the plurality of polymer fibers at...

The present technology advancement in biomedical, micro-electro-mechanical systems (MEMS) engineering, bio-MEMS, healthcare, etc. is driving the need to fabricate devices with multi-level, high aspect ratio and complex microstructures which in turn requires high quality mold inserts with all these features. This research addressed fabrication challenges of a PMMA mold insert template containing...

Micromachined microsystems and Micro Electro Mechanical Systems (MEMS) have made possible the development of highly accurate and portable sensors and instrument for a variety of applications in the health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated c...

Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator...

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...

Nanotechnology brings together various functional areas for interdisciplinary research, making it necessary for them to reside in a single facility. The conjoining of biology, biomedical engineering, and bio-nano-micro-electro-mechanical systems (MEMS) with semiconductor and MEMS processing requires that these technologies coexist in ultraclean facilities, while the facility designs and operati...

Within the past decade, researchers in the field of tissue engineering have recognized the need for newmaterials with soft and elastic properties. As a result, many groups have focused on the synthesis, characterization, and application of materials with a wide range of biodegradable and elastomeric properties.1 The combination of these polymers with Micro–Electro–Mechanical Systems (MEMS) tech...