Nanotechnology brings together various functional areas for interdisciplinary research, making it necessary for them to reside in a single facility. The conjoining of biology, biomedical engineering, and bio-nano-micro-electro-mechanical systems (MEMS) with semiconductor and MEMS processing requires that these technologies coexist in ultraclean facilities, while the facility designs and operati...

Within the past decade, researchers in the field of tissue engineering have recognized the need for newmaterials with soft and elastic properties. As a result, many groups have focused on the synthesis, characterization, and application of materials with a wide range of biodegradable and elastomeric properties.1 The combination of these polymers with Micro–Electro–Mechanical Systems (MEMS) tech...

After testing each device on the old demonstration chip, new ways of improving it were explored. The previous test chip had several redundant devices which limited the opportunities to characterize the structural films. As a result, the next generation chip was laid out with new and redesigned devices that allow students to explore parameters and concepts significant to MEMS, i.e. stress, strai...

Determining the interfacial adhesion of ultrathin functional films in micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) becomes increasingly crucial for optimal design of MEMS/NEMS devices. However, direct measurement of adhesion properties of ultrathin films can be challenging, as the traditional metrology of adhesion at macroscopic scales becomes unsuitable in...

In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...

Abstract The NiCr micro-heater is a key element of MEMS-based electro-explosive device (mEED), while electrostatic discharge (ESD) may excite the accidentally. To discover mechanism that how ESD excitations effect on heat response performance micro-heater, electro-thermal conversion process was numerically modelled by using commercial software. Three different shapes micro-heaters, including re...

With the development of Micro Electro Mechanical System(MEMS), it's application in the fields of biomedical engineering becomes a vital consideration. This paper describes the advantages of Minimally invasive Surgery (MIS) and its applications. A novel medical endoscope driven by micro robot is also introduced.

Wireless Sensor Networks (WSN) have gained wide popularity and have increased tremendously in recent time due to growth in Micro-Electro-Mechanical Systems (MEMS) technology. WSN has the potentiality to connect the physical world with the virtual world by forming a network of sensor nodes. Energy saving of sensor nodes is a major design

A new type of optical pulse shaper for arbitrary waveform generation is demonstrated, based on fiber Bragg grating and micro-electro-mechanical system (MEMS) technologies. This is an on-chip device which is compact, robust, monolithic, and programmable and can be used for a variety of applications such as higher order dispersion compensation in fiber communication links and high-energy pulse am...

We have developed a new microelectromechanical logic device using the MEMS (Micro Electro Mechanical Systems) technology. This device consists simply of a single cantilever and two driving electrodes with two contact pads for electrostatic operation. Both exclusive NOR (XNOR) and exclusive OR (XOR) logic devices have been realized using this simple construction.