We report on a new wafer transfer technique that can remove and transfer surface-micromachined layers to application-specific substrates. This process, however, is not limited to only MEMS devices and can be applicable to other semiconductor devices. Successful transfer of a 1 cm x 1 cm MEMS chip with electrostatically actuated curled cantilever switches to a transparent quartz substrate has be...

A process is presented for the fabrication of high quality factor (Q), temperature-compensated silicon resonators without release-etch perforations within the epitaxial polysilicon encapsulation (epi-seal). Electrostatically actuated Lamé-mode square resonators up to 400 μm wide with frequencies from 8 to 107 MHz are released with no etch perforations, resulting in high f-Q products of up to 2e...

In this paper, we report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 m, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror st...

A free boundary problem describing small deformations in a membrane based model of electrostatically actuated MEMS is investigated. The existence of stationary solutions is established for small voltage values. A justification of the widely studied narrow-gap model is given by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap...

Micromechanical structures have been designed, fabricated in silicon and tested for use as on-chip voltage reference. Applications are in electrical metrology and in integrated silicon microsystems. Microbeams of 100 μm length, 3 μm width and 11μm thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstrated an initial drift of -12 mV over 10 d...

We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatically ac-tuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space of the displacement, implying the existence of a critical voltage beyond which there are no solutions of the equation. This critical voltage corresponds to the pull-in vo...

Abstract The entire process of calibrating an electromechanical simulator – identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device – is presented. The simulation model for electrostatically actuated beams is calibrated to a wide range of electrical and optica...

This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two–dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projecte...

We demonstrate a silicon-based high-frequency nanomechanical device capable of switching controllably between two states at room temperature. The device uses a nanomechanical resonator with two distinct states in the hysteretic nonlinear regime. In contrast to prior work, we demonstrate room-temperature electrostatic actuation and sensing of the switching device with 100% fidelity by phase modu...