نتایج جستجو برای: inductively coupled plasma

تعداد نتایج: 546406  

Journal: :Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 1999

Journal: :Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2011

Journal: :AIP Advances 2022

In regard to collisionless heating in inductively coupled discharges, two approaches have been widely adopted describe the energy transfer between electrons and radio frequency field. One approach is based on consistent kinetic theory, by which resulting field can be expressed as superposition of a series plane waves resonant interactions happen each wave, might dominate heating. Another single...

1996
Robert J. Hoekstra Mark J. Kushner

Inductively coupled plasma ~ICP! reactors are being developed for low gas pressure ~,10s mTorr! and high plasma density ~[e].10 cm! microelectronics fabrication. In these reactors, the plasma is generated by the inductively coupled electric field while an additional radio frequency ~rf! bias is applied to the substrate. One of the goals of these systems is to independently control the magnitude...

Ali Ramazani, Fariba Sadri, Hamideh Ahankar, Mehdi Khoobi, Nahid Dayyani, Pegah Azimzadeh Asiabi Saeid Taghavi Fardood Sang Woo Joo

Nanomagnetic MgFe2O4 is an active, stable, and reusable catalyst for the oxidation of alcohols. The oxidation of various primary and secondary alcohols has been examined and related corresponding products were obtained in good yields. The reactions were carried out in the presence of water as solvent and oxone (at room temperature) or H2O2 (at 60 ºC) as an oxidant. The catalyst was investigated...

Journal: :Journal of the Korean institute of surface engineering 2013

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