Developing an accurate model for MEMS devices and structures is a great asset for future design optimization and provides insight into experimental results. A thermal conductivity pressure sensor was microfabricated to evaluate the success of a glass frit vacuum packaging scheme. The sensor and the package dimensions present classical size effects that must be included in the model for accuracy...

Microelectromechanical systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and, thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This...

UNLABELLED The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ult...

A new class of LC-resonators for micro-magnetic sensor device was invented and fabricated by means of micro-electromechanical system (MEMS) technique. The micro-LC-resonator consists of a solenoidal micro-inductor with a bundle of soft magnetic micro-wire cores and a capacitor connected in parallel to the micro-inductor. The core magnetic material is a tiny glass-coated Co83.2B3.3Si5.9Mn7.6 mic...

Integrated circuit packaging and their testing is well advanced because of the maturity of the IC industry, their wide applications, and availability of industrial infrastructure.[1,2] This is not true for MEMS with respect to packaging and testing. It is more difficult to adopt standardized MEMS device packaging for wide applications although MEMS use many similar technologies to IC packaging....

We present a cryogenic measurement setup installed inside a focused-ion-beam sFIBd system to characterize and microrepair microelectromechanical systems sMEMSd for space applications. The setup allows testing of MEMS devices under vacuum condition of 10−6 Torr at variable temperatures ranging from 298 to 20 K. In the experiment, a lead-zirconate-titanate translator powered by a function generat...

The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to...

--MEMS based mass sensors are being designed to identify the small amounts of materials especially for monitoring the food supply. The Fabrication of MEMS includes deposition of material layers, pattering by photolithography and etching to produce the required shapes, consequently leading to time taking and expensive method. In order to reduce the working time of sensor to market a Finite eleme...

The paper deals with optical microelectromechanical systems (MEMS), and in particular with optical MEMS based on moving waveguides. After a short overview of this very attractive novel activity, specific technological problems and solutions are discussed. Then the following examples of recent developments based on silica on silicon technology are presented: optical switch, vibration sensor, and...

We classify surface textures using a polymer-based microelectromechanical systems (MEMS) tactile sensor array and a robust statistical approach. We demonstrate that a MEMS tactile sensor resembling a flexible sensor ‘skin’ built using a polyimide substrate can successfully classify textures. Texture classification is achieved by using a maximum likelihood decision rule that optimally classifies...