A novel concept for dynamic focus shaping based on highly efficient coherent beam combining with micro-lens arrays (MLAs) as the element is presented. This allows us to control power weights of diffraction orders by varying absolute phases an array input beams. proof-of-principle experiment supported simulations. For this, matrix <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display=...

In this paper, the architecture, processing errors analysis and optimization method of a dual-mass silicon micro-gyroscope are presented. The dual-mass silicon micro-gyroscope consists of two identical single mass gyroscopes and a lever mechanism. Driving decoupling springs and sensing decoupling springs are key components to achieve motion decoupling. The processing error analysis indicates th...