The field of microfluidics has seen breath-taking progress since its beginnings in the 1980s and early 1990s. While much of the initial work was a by-product of mainstream micro-electro-mechanical systems (MEMS) and silicon based fabrication schemes, soon a specialized research field developed. Over the last decade a strong, highly interdisciplinary microfluidics community emerged with roots in...

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...

Nanotechnology brings together various functional areas for interdisciplinary research, making it necessary for them to reside in a single facility. The conjoining of biology, biomedical engineering, and bio-nano-micro-electro-mechanical systems (MEMS) with semiconductor and MEMS processing requires that these technologies coexist in ultraclean facilities, while the facility designs and operati...

Within the past decade, researchers in the field of tissue engineering have recognized the need for newmaterials with soft and elastic properties. As a result, many groups have focused on the synthesis, characterization, and application of materials with a wide range of biodegradable and elastomeric properties.1 The combination of these polymers with Micro–Electro–Mechanical Systems (MEMS) tech...

INTRODUCTION Because they have higher isolation and lower insertion loss compared to semiconductor switches, the last decade has seen the development of several types of MEMS (Micro Electro Mechanical Systems) switch. Many of these are electrostatically actuated and so need high drive voltages, limiting the initial gap between the contact points to a few micrometers [1-3]. Such small gaps betwe...

Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variant...

System Dynamics and Adaptive Control for MEMS Gyroscope Sensor Juntao Fei1,2 and Hongfei Ding2 1Jiangsu Key Laboratory of Power Transmission and Distribution Equipment Technology 2College of Computer and Information, Hohai University, Changzhou, 213022, P. R. China Abstract: This paper presents an adaptive control approach for Micro‐Electro‐Mechanical Systems (MEMS) z‐axis gyroscope sensor....

Micro Electro-Mechanical Systems (MEMS) have been developed for years and find a wide range of applications. Nevertheless, there is still a lack of efficient collaboration between expert teams involved in MEMS design to enable an efficient multidisciplinary approach. Furthermore, the shrinking of the systems’ size and their growing integration level require to design HW and SW subsystems in a m...

Corresponding author, Email: [email protected] ABSTRACT In this paper, we present a preliminary research effort towards an effective computer support environment for the design and development of micro-electro-mechanical systems (MEMS). We first identify the characteristics of MEMS product design and development processes and examine the state-of-the-art of MEMS Computer-aided Design (CAD) and s...

Precision of nano-metric operations is an important issue in nano-engineering studies. Several operative parameters might affect the quality of results. The parameters of the nano world are significant but not entirely controllable. However, the geometrical and mechanical properties of micro cantilevers are completely controllable. So, controlling the sensitivity of resulting image through t la...