An optical micro-electro-mechanical systems (MEMS) structure is provided. The structure includes an elastomer membrane, a plurality of polymer fibers attached to the elastomer membrane, an array of detectors operatively connected to the plurality of polymer fibers at a first end of the plurality of polymer fibers, and a microlens array operatively connected to the plurality of polymer fibers at...

This paper presents the advances done in the field of simulation and design applied to MEMS. It will be discussed some techniques to link different finite element softwares, especially COMSOL and ANSYS, in order to profit from all the advantages offered by each finite element code. Then, an explication is done on how we piloted ABAQUS using a Matlab routine. In a third and very important sectio...

The present technology advancement in biomedical, micro-electro-mechanical systems (MEMS) engineering, bio-MEMS, healthcare, etc. is driving the need to fabricate devices with multi-level, high aspect ratio and complex microstructures which in turn requires high quality mold inserts with all these features. This research addressed fabrication challenges of a PMMA mold insert template containing...

Today many position aware devices are demanded. Micro-Electro-Mechanical Systems (MEMS) can detect their own acceleration. Out of these values the movement, and thus the new position, can be calculated. The problem of these systems is, they are very error-prone. In order to minimize the fault this paper introduces a new way of combining different MEMS measurements to achieve a more accurate rel...

We report design and fabrication process of MEMS (Micro Electro Mechanical Systems) actuators for a new type of optical switch integrated with photonic crystal (PhC) waveguides. Thin film poly-silicon electrostatic microactuator (either a cantilever or a bridge style) is placed over a PhC waveguide to induce optical modulation by means of mechanical motion in the evanescent fields. For low volt...

This paper presents Artificial Neural Network (ANN) implementation for Mechanical modeling of Radio Frequency Micro Electro Mechanical System (RF MEMS) lateral double beam switch. We propose an efficient approach based on ANN for analyzing the static and dynamic characteristics of RF MEMS lateral switch by calculating its characteristics parameters. ANN model were trained with five learning alg...

Lithium-ion secondary batteries are commonly used in electric vehicles, smart phones, personal digital assistants (PDA), notebooks and electric cars. These lithium-ion secondary batteries must charge and discharge rapidly, causing the interior temperature to rise quickly, raising a safety issue. Over-charging results in an unstable voltage and current, causing potential safety problems, such as...

Growing need for a variety of micro electro-mechanical systems necessitates advances in manufacturing technologies for high volume production at low cost. In this study, a mechanical micro pump actuator will be modelled using MEMS module of COMSOL simulation tool. The micro pump actuator will be based on bimetallic actuation which in-turn is based on the difference in the thermal expansion coef...

Micromachined microsystems and Micro Electro Mechanical Systems (MEMS) have made possible the development of highly accurate and portable sensors and instrument for a variety of applications in the health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated c...

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...