Vibrations of a fixed–fixed narrow microbeam electrostatically actuated by applying a voltage difference to it and a parallel rigid conductor are analyzed. For gaps between the two conductors that are comparable to the beam’s thickness, the fundamental frequency of the beam may first increase with increasing applied voltage, before suddenly dropping at the pull-in voltage. Available models fail...

D. Di Maio and S. G. Roberts Department of Materials, University of Oxford, UK keywords: toughness, coating, nanoindentation. Abstract Measuring the toughness of brittle coatings has always been a difficult task. Coatings are often too thin to easily prepare a freestanding sample of a defined geometry in order to use standard toughness measuring techniques. Using standard indentation techniques...

We consider squeeze film gas damping during microbeam motion away and toward a substrate as occurs during opening and closing of RF switches and other MEMS devices. The numerical solution of the gas damping problem in two-dimensional geometries is obtained based on the Boltzmann-ESBGK equation. The difference in damping force between downward and upward moving beams is shown to vary from as lit...

Abstract Vibration analysis of functionally graded (FG) microbeams carrying a moving mass is carried out in the framework Timoshenko beam theory. The material properties are considered to be thickness by power-law function, and they estimated Mori-Tanaka scheme. influence microsize effect captured with aid modified couple stress theory (MCST). A finite element formulated used establish discreti...

Abstract By relying on the Euler–Bernoulli beam model and energy variational formula, we indicate critical temperature causes in buckling of piezo-flexomagnetic microscale beams. The corresponding size-dependent approach is underlying as a second strain gradient theory. Small deformations elastic solids are assessed, mathematical discussion linear. Regardless pyromagnetic effects, thermal loadi...