We demonstrated embossed and intaglio nanopatterning using Nanopipette based on the QTF-AFM (Quartz Tunning Fork-Atomic Force Microscopy) system. Used materials in the patterning system were nanoparticles solution and acetone for delivery solution mica and flat plastic for substrate mica. By realizing the nano-scaled liquid ejection technique with the pulled nanopipette conbined QTF-AFM, variou...

We have proposed, designed, manufactured and tested low loss dielectric micro-lenses for infrared (IR) radiation based on a dielectric metamaterial layer. This metamaterial layer was created by patterning a dielectric surface and etching to sub-micron depths. For a proof-of-concept lens demonstration, we have chosen a fine patterned array of nano-pillars with variable diameters. Gradient index ...

Nano-fabrication technologies for patterned structures made from thin films are reviewed. A classification is made to divide the patterning technologies in two groups namely with and without the using a mask. The more traditional methods as well as a few new methods are discussed al in relation with the application. As mask less methods we discussed direct patterning with ions including FIB, na...

Patterning of materials at sub-10 nm dimensions is at the forefront of nanotechnology and employs techniques of various complexity, efficiency, areal scale, and cost. Colloid-based patterning is known to be capable of producing individual sub-10 nm objects. However, ordered, large-area nano-arrays, fully integrated into photonic or electronic devices have remained a challenging task. In this wo...

Patterning below 10 nm with conventional techniques such as Litho-etch (LE*), a subtractive self-aligned multiple patterning process, suffers from limitations due to edge placement errors, decreasing throughput, complexity, pattern collapse, photoresist non-uniformity. Bottom-up processes for fabrication of nano devices by means Area selective deposition (ASD) are peaking up over top-down appro...

Biomolecular motor proteins have the potential to be used as 'nano-engines' for controlled bioseparations and powering nano- and microelectromechanical systems. In order to engineer such systems, biocompatible nanofabrication processes are needed. In this work, we demonstrate an electron beam nanolithography process for patterning kinesin motor proteins. This process was then used to fabricate ...

We report a non-lithographical method for the fabrication of ultra-thin silicon (Si) nanowire (NW) and nano-sheet arrays through metal-assisted-chemical-etching (MacEtch) with gold (Au). The mask used for metal patterning is a vertical InAs NW array grown on a Si substrate via catalyst-free, strain-induced, one-dimensional heteroepitaxy. Depending on the Au evaporation angle, the shape and size...

We demonstrate a conceptually new mechanism for sub-wavelength focusing at optical frequencies based upon the use of nano-hole quasi-periodic arrays in metal screens. Using coherent illumination at 660 nm and scanning near-field optical microscopy, ~290 nm “hot spots”, were observed at a distance of ~12.5 μm from the array. Even smaller hot-spots of about 200 nm in waist were observed closer to...