The development of ferroelectric random-access memory (FeRAM) technology with control of grain boundaries would result in a breakthrough for new nonvolatile memory devices. The excellent piezoelectric and electrical properties of bulk ferroelectrics are degraded when the ferroelectric is processed into thin films because the grain boundaries then form randomly. Controlling the nature of nucleat...

A series of laser pump, x-ray probe experiments show that above band gap photoexcitation can generate a large out-of-plane strain in multiferroic BiFeO3 thin films. The strain decays in a time scale that is the same as the photo-induced carriers measured in an optical transient absorption spectroscopy experiment. We attribute the strain to the piezoelectric effect due to screening of the depola...

A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic analyses. The results of the investigations prove that an undulatory motion of the fin-like micro-f...

In the present study, the classical plate theory (CPT) was used to study sound radiation of forced vibrating thin circular plates coupled with piezoelectric layers using simply supported and clamped boundary conditions. The novelty of the study consists of an exact closed-form solution that was developed without any use of approximation. Piezoelectric, electrical potential loaded in the transve...

The piezoelectric boundary integral equation (BIE) formulation is applied to analyze thin piezoelectric solids, such as thin piezoelectric films and coatings, using the boundary element method (BEM). The nearly singular integrals existing in the piezoelectric BIE as applied to thin piezoelectric solids are addressed for the 2-D case. An efficient analytical method to deal with the nearly singul...

The RF band pass filters are important for wireless communication applications. They can be realized using Thin Film Bulk Acoustic Resonator (TFBAR).TFBAR is designed using Aluminium Nitride (AlN) and electrodes of piezoelectric material are made with Platinum (Pt).Various modelling techniques has been used for realizing three layered TFBAR structure. Modified Butter worth‐v...

Abstract The transverse piezoelectric coefficients d 31 of membranes is fundamental to the design, simulation, optimization, and applications devices using Aluminum Nitride (AlN). In this work, a method based on inverse effect proposed characterize . Based equation thin film vibration equation, central displacement Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) linearly related DC v...

The RF band pass filters are important for wireless communication applications. They can be realized using Thin Film Bulk Acoustic Resonator (TFBAR).TFBAR is designed using Aluminium Nitride (AlN) and electrodes of piezoelectric material are made with Platinum (Pt).Various modelling techniques has been used for realizing three layered TFBAR structure. Modified Butter w...

Ultrasonic motors are expected to be used as microactuators because of their high torque, low speed and simple construction. We have already reported cylindrical-shaped micro ultrasonic motors which utilized a lead zirconate titanate (PZT) thin film. In this paper, we discuss a micro ultrasonic motor composed of bulk PZT. The stator transducer had dimensions of 2.4 mm in diameter and 10 mm leng...