We report a newly developed design/fabrication module with low-cost single-sided "low-stress-silicon-nitride (LS-SiN)/polysilicon (poly-Si)/Al" process for monolithic integration of composite sensors for sensing-network-node applications. A front-side surface-/bulk-micromachining process on a conventional Si-substrate is developed, featuring a multifunctional SiN/poly-Si/Al layer design for d...

Carbon nanotube (CNT) arrays can be drawn into a web and then twisted into threads. These CNT threads contain thousands of carbon nanotubes in their cross-section and can be further composed into yarns consisting of one or more threads. CNT yarns exhibit significant mechanical stiffness and strength and low electrical resistivity. More importantly, CNT yarns exhibit piezoresistance that could b...

This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and an optical or piezoresistive detector. Initially the microcantilever is excited by electrostatic force to near pull-in voltage. The nonlinear behavi...

This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The silicon based sensor system consists of piezoresistive mechanical stress transducers integrated in thin membrane hinges supporting a suspended flexible cross structure. The mechanical behavior of the fragile micromechanical structure is...

Abstract Three-dimensional (3D) printing has become an important fabrication method for soft robotics, due to its ability make complex 3D structures from computer designs in simple steps and multimaterial co-deposition ability. In this article, the application of techniques four types tactile sensors commonly used including piezoresistive sensor, capacitive piezoelectric triboelectric will be d...

The typical layout in a piezoresistive tactile sensor arranges individual sensors to form an array with M rows and N columns. While this layout reduces the wiring involved, it does not allow the values of the sensor resistors to be measured individually due to the appearance of crosstalk caused by the nonidealities of the array reading circuits. In this paper, two reading methods that minimize ...

The main limitation of high-temperature piezoresistive pressure sensors is the variation of output voltage with operating temperature, which seriously reduces their measurement accuracy. This paper presents a passive resistor temperature compensation technique whose parameters are calculated using differential equations. Unlike traditional experiential arithmetic, the differential equations are...

The production of large and complex parts using fiber composite materials is costly due to the frequent formation of voids, porosity and waste products. By embedding different types of sensors and monitoring the process in real time, the amount of wastage can be significantly reduced. This work focuses on developing a knowledge-based method to improve and ensure complete impregnation of the fib...

− This paper proposes a low-cost technique to compensate for the temperature dependence of piezoresistive pressure sensors configured in a Wheatstone bridge. The sensor is treated as a resistive circuit and three equivalent resistances are measured by setting appropriately the bridge terminals. One of these equivalent resistances depends on temperature but not on pressure and, hence, it can be ...