A system of in situ ultrasonic sensors has been developed that can be used to monitor the photoresist prebake process. A high frequency phase measurement monitors the resist film properties while a lower frequency time of flight measurement monitors the corresponding wafer temperature. The high frequency measurement involves calculating the phase of an ultrasound signal as it is reflected from ...

Energy harvesting system is using ambient energy conversion in the environment. The environmental will be converted into usable electrical that can used controlling wireless electronic devices. available mechanical vibration from sound then to by a piezoelectric transducer. size of represents surface area electrode on model. A smaller transducer unable produce good due area. bigger dimension mo...

In this study, we fabricated piezoelectric energy harvesters composed of lead-free (K,Na)NbO3 (KNN) thin films and compared the power generation performance with PZT-thin film energy harvesters. Both of the piezoelectric thin films were deposited on Pt/Ti/Si cantilevers by rf-sputtering. The KNN and PZT thin films had perovskite structure, and showed the relative dielectric constants of 744 and...

We demonstrate a water-immersible thin film lead zirconate titanate, Pb(Zr,Ti)O3, [PZT] actuator, without special passivation layer, towards in-vivo or in-vitro scanning probe microscope (SPM) measurements of living cells in water or biological fluids. In order to be water-immersible, the electrodes need to be electrically insulated and the piezoelectric layer needs to be protected against dire...

Photoacoustic (PA) signals are short ultrasound (US) pulses typically characterized by a single-cycle shape, often referred to as N-shape. The spectral content of such wideband signals ranges from a few hundred kilohertz to several tens of megahertz. Typical reception frequency responses of classical piezoelectric US imaging transducers, based on PZT technology, are not sufficiently broadband t...

The electro-optical properties of lead zirconate titanate (PZT) thin films depend strongly on the quality and crystallographic orientation of the thin films. We demonstrate a novel method to grow highly textured PZT thin films on silicon using the chemical solution deposition (CSD) process. We report the use of ultrathin (5-15 nm) lanthanide (La, Pr, Nd, Sm) based intermediate layers for obtain...

In this paper, the interdisciplinary energy harvesting issues on piezoelectric energy harvesting were investigated using a ‘33’ mode (mechanical stress and/or electric field are in parallel to the polarization direction) lead zirconate titanate multilayer piezoelectric stack (PZT-Stack). Key energy harvesting characteristics including the generated electrical energy/power in the PZT-Stack, the ...

This paper describes the use of micromachined lead zirconate titanate (PZT) piezoceramic elements for heat generation by ultrasonic energy dissipated within the elements and surrounding media. Simulations based on three-dimensional finite-element models suggest that circular disk-shaped elements provide superior steady-state temperature rise for a given cross-sectional area, volume of the PZT e...

Recent biological studies on water strider insects revealed the detailed mechanism of their staying and walking on water. While macro scale bodies use buoyancy to stay on water, these very light and small insects balance their weight using repulsive surface tension forces where the insect legs are covered with hydrophobic micro-hairs. Utilizing the unique scaling advantage of these insects, thi...

Hertzian, dry, pointlike contacts are used to couple ultrasonic energy efficiently to plate wave modes in anisotropic solid plates. A new transducer configuration using a piezoelectric PZT-5H transducer and a quartz buffer rod is realized for this purpose. In particular, the lowest order antisymmetric Lamb wave (A0) mode is excited and detected in anisotropic plates at a frequency of 200 kHz an...