نتایج جستجو برای: rf sputtering
تعداد نتایج: 40854 فیلتر نتایج به سال:
We report the fabrication and characterization of high index contrast (Δn≈0.9) GeTe4 channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe4 films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. ...
Gallium doped zinc oxide, GZO, thin films have been deposited onto glass substrate by rf magnetron sputtering at various substrate temperatures. The electrical and optical properties of the thin films have been studied as a function of substrate temperature. X-ray diffraction was used in order to investigate thin film structures. The thin film structure was stabilised by heating the samples in ...
By using Radio Frequency (RF) magnetron sputtering method, Pb(Zr0.5Ti0.5)O3 (PZT) thin films were deposited on Pt/Ti/ SiO2/Si substrates. Pt/Ti bottom electrode was fabricated on SiO2/Si substrates by magnetron dual-facing-target sputtering system. Phase and crystalline structure analyses of the PZT films were performed on an X-ray diffraction(XRD), Surface morphology, roughness and particle si...
The corrosion resistant coatings used conventionally are susceptible to degradation, leading to pitting corrosion. This report summarizes the corrosion resistant nature of thin films of Cu-TiO2 coated on mild steel, in different corrosion environments. Nano meter thick (100nm, 125nm, 150nm) composite coatings were coated on steel substrate by RF magnetron sputtering technique. The required targ...
Using the reactive magnetron rf co-sputtering technique and a Ti target partially covered with a small Al plate, TiAlN coatings were made on c-Si in a reactive atmosphere of nitrogen and argon. Coatings were deposited on substrates at 22°C and at 150°C. The substrate temperature notably affected the thickness, crystalline grain size, and hardness of the coatings. We analyzed the dependence of b...
Spray pyrolysis technique (SPT) and radio-frequency magnetron sputtering (RF-MS) were used to obtain vanadium oxide (VxOy) layers. The surface morphology was visualized using scanning electron microscopy (SEM) atomic force (AFM). Further, t
The critical condition for the giant magnetoresistance (GMR) effect has not yet been fully clarified. Reports on the MR ratio of C o / C u multilayers (MLs) disagree as to whether the interfacial roughness or crystallinity of the MLs is the cause. The film morphology is significantly affected by sputtering conditions such as sputtering gas and pressure. This paper presents some results of the m...
Transparent ZnO–PTFE composite thin films deposited via RF co-sputtering are demonstrated as antireflective and antimicrobial display coatings high-sensitivity touch sensor for a wide range of applications in interactive devices safer experience.
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