Backscattered electron Kikuchi patterns (BEKP) suitable for crystallographic phase analysis can be collected in the scanning electron microscope (SEM) with a newly developed charge coupled device (CCD) based detector. Crystallographic phase identification using BEKP in the SEM is unique in that it permits high magnification images and BEKPs to be collected from a bulk specimen. The combination ...

Gratings of 10 nm wide metal lines 30 nm apart, and quantum transistor gates with 10 nm wide gaps over 300 nm long between two metal rectangles have been repeatedly achieved on thick GaAs substrates using a modified scanning electron microscope operated at 35 keV and liftoff of Ni/Au. Furthermore, multilevel electron beam lithography with a standard deviation (30) of an overlay accuracy (30 dev...

Two powerful and complementary techniques for chemical characterisation of nanoscale systems are electron energy-loss spectroscopy in the scanning transmission electron microscope, and X-ray absorption spectroscopy in the scanning transmission X-ray microscope. A correlative approach to spectro-microscopy may not only bridge the gaps in spatial and spectral resolution which exist between the tw...

A dedicated Scanning Transmission Electron Microscope is ideally coupled with the energy dispersive x-ray and electron energy loss spectroscopies to obtain information about the chemical composition, morphology and electronic structure on the nanoscale. With several signals being available simultaneously with the pass of a subnanometre-sized beam, this instrument can answer questions from a bro...