In this paper, unique surface sensing property and enhanced sensitivity in microring resonator biosensors based on subwavelength grating (SWG) waveguides are studied and demonstrated. The SWG structure consists of periodic silicon pillars in the propagation direction with a subwavelength period. Effective sensing region in the SWG microring resonator includes not only the top and side of the wa...

We investigate the low loss acoustic motion of superfluid He parametrically coupled to a very low loss, superconducting Nb TE011 microwave resonator, forming a gram-scale, sideband resolved, optomechanical system. We demonstrate the detection of a series of acoustic modes with quality factors as high as × 1.4 107. At higher temperatures, the lowest dissipation modes are limited by an intrinsic ...

Acoustic wave resonators are promising for gravimetric biosensing. However, they generally suffer from strong acoustic radiation in liquid, which limits their quality factor and increases frequency noise. This article presents an acoustic-radiation-free biosensor based on a locally-resonant surface phononic crystal (SPC) consisting of periodic high aspect ratio electrodes to ad-dress the above ...

A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many applications and depends on structural geometry, fluid-structure interaction, and the device encapsulation. Resonators with at least one surface exposed to air can ...

Helmholtz resonator is a shell Ωshell separating a compact domainthe cavity Ωint ⊂ R3 from the non-compact domain Ωout = R3\[Ωint∪Ωshell]. It is assumed that a small opening in the shell connects Ωint with Ωout, causing transformation of real eigen-frequencies of the Neumann Laplacian on Ωint into complex scattering frequencies of the corresponding stationary acoustic problem −∆u = λu, in Ω = Ω...

This paper deals with the measurement of acoustic particle velocity and acoustic streaming velocity in a closed-loop waveguide in which a resonant traveling acoustic wave is sustained by two loudspeakers appropriately controlled in phase and amplitude. An analytical model of the acoustic field and a theoretical estimate of the acoustic streaming are presented. The measurement of acoustic and ac...

The design of a 500 MHz oscillator in a 65 nm CMOS process using a 2 GHz bulk acoustic wave (BAW) resonator is presented. A digital frequency control is implemented using a switched capacitor bank in parallel to the resonator. The tuning range is up to 500 kHz with a minimum step of 200 Hz. The oscillator core uses a differential topology and is designed for low phase noise (2128 dBc/Hz at 100 ...

Abstract We study the relationship between surface mechanical load represented by distributed acoustic impedance and current density distribution in a shear mode piezoelectric plate wave resonator. A theoretical analysis based on theory of piezoelectricity trigonometric series is performed. In specific basic case when due to local mass layer, numerical results show that concentrates under layer...

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered for the simulation study. Initially the occurrence of Sezawa wave mode and displacement amplitud...