Abstract Lead-free epitaxial (K 0.47 Na 0.53 )NbO 3 (KNN) thin films were fabricated on (001)SrRuO /Pt/ZrO 2 /Si substrates by RF magnetron sputtering at 650 °C and post-annealed the same a rapid thermal annealing (RTA) process. The crystal structure of KNN changed RTA, i.e. lattice parameter c in out-of-plane direction decreased instead an increase in-plane direction. displacement–electric fie...

Title of dissertation: PIEZOELECTRIC MICROBEAM RESONATORS BASED ON EPITAXIAL Al0.3Ga0.7As FILMS Lihua Li, Doctor of Philosophy, 2005 Dissertation directed by: Professor Don DeVoe Department of Mechanical Engineering In this work, piezoelectric resonators based on single crystal Al0.3Ga0.7As films are implemented. The combination of Si doped Al0.3Ga0.7As as electrode layers and moderate piezoele...

Based on the multi-chamber series structure, a piezoelectric micropump with high output performance is proposed in this paper. The composed of circular unimorph vibrator, cantilever check valve, and pump body. First, working process was analyzed detail. Then, effect key dimension parameters explored. mainly refer to height chamber valve opening (the deformation size valve). Finally, experimenta...

We investigate the harvesting of sound waves by exploiting a 3D-printed gradient-index phononic crystal lens. The concept is demonstrated numerically and experimentally for focusing audio frequency range acoustic in air to enhance energy harvesting. A finite-element model developed design unit cell dispersion properties construct 3D lens wave field simulations. Numerical simulations are present...

The emergence and evolution of energy micro-generators during the last 2 decades has delivered a wealth harvesting powering solutions, with capability exploiting wide range motion types, from impulse low frequency irregular human motion, to broadband vibrations ultrasonic waves. It also created background engineering microsytems, including fabrication methods, system concepts optimal functional...

Title of thesis: MEMS CONVEYANCE: PIEZOELECTRIC ACTUATOR ARRAYS FOR RECONFIGURABLE RF CIRCUITS Mary Claire Tellers, Master of Science 2015 Thesis directed by: Professor Sarah Bergbreiter Department of Mechanical Engineering An array of piezoelectric cantilevers was designed, fabricated, and characterized for use as a micromanipulation surface in a reconfigurable RF circuit microfactory. The pro...