The aim of this paper is to propose a complete normalized study of a diaphragm's behavior under classical excitation encountered in microsystem: pneumatic, electrostatic, piezoelectric and magnetic. The principle of modeling is widely described in order to be easily applied to other structure. First, a traditional analytical solution is recalled for the diaphragm's deflection based on energy mi...

In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides of a central mirror plate. Experiments show that an actuation characteristics difference of as m...

Smart actuators have many potential applications in various areas, so the development of novel actuation materials, with facile fabricating methods and excellent performances, are still urgent needs. In this work, a novel electromechanical bimorph actuator constituted by a graphene layer and a PVDF layer, is fabricated through a simple yet versatile solution approach. The bimorph actuator can d...

Actuation devices are used for many space applications and there is increasing need to reduce their size, mass, cost and power consumption. To address this need, JPL is developing electroactive polymers (EAP) with emphasis on two EAP categories that induce large bending and longitudinal actuation strains. Comparison between EAP and the widely used transducing actuators shows that, while lagging...

For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage actuation speed. Three-dimensional electromechanical modeling including many non-linearities has been performed to study some static but mainly dynamic features. The results show that the involved parameters have influences spee...

This work presents the results of experimental and theoretical study static pull-in tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on combination inductive electrostatic actuation. A semi-analytical model to such phenomenon is developed, for first time, as result using qualitative technique Lagrangian approach analyze contactless suspensions recent progress in cal...