We have used multiphoton absorption polymerization to fabricate a series of microscale polymer cantilevers. Atomic force microscopy has been used to characterize the mechanical properties of microcantilevers with spring constants that were found to span more than four decades. From these data, we extracted a Young’s modulus of E=0.44 GPa for these microscale cantilevers. The wide stiffness rang...

Surface stress measurements using atomic force microscopy ~AFM! require theoretical knowledge of the surface stress induced deformation of AFM cantilever plates. In a companion paper @J. E. Sader, J. Appl. Phys. 89, 2911 ~2001!#, a detailed theoretical study of the effects of homogeneous surface stress on rectangular AFM cantilever plates was presented. Since cantilevers of both rectangular and...

Related Articles The additive effect of harmonics on conservative and dissipative interactions J. Appl. Phys. 112, 124901 (2012) Note: Radiofrequency scanning probe microscopy using vertically oriented cantilevers Rev. Sci. Instrum. 83, 126103 (2012) Switching spectroscopic measurement of surface potentials on ferroelectric surfaces via an open-loop Kelvin probe force microscopy method Appl. Ph...

S.Z. cantilevers are made using a simple one-mask fabrication process with.characterization of a cantilever-type MEMS chemical sensor for detection of chemicals. MEMS has been with the advancement of cantilever-type sensors.sensor. The mechanical structure is a cantilever, having its own resonant frequency. MEMS cantilevers can be as thin as a few nanometers with lengths.Cantilever-based Sensor...

Cantilevers fabricated by means of micromachining techniques are usually used for atomic force microscopy. In this paper, the spring constant of an atomic force microscope (AFM) cantilever is determined by using a large-scale cantilever. Since the spring constant of the large-scale cantilever is calibrated accurately, the spring constant of the AFM cantilever is determined precisely by measurin...

This paper describes design, fabrication, and characterization of microhotplates based on microcantilevers. Six different hotplate cantilever esigns are proposed to investigate heating response time and temperature uniformity. Devices were fabricated and their electrical, thermal, and echanical characteristics were measured. The cantilevers have electrical resistance in the 1 k range, consume 1...

A method is presented that allows direct measurement of a wide range of spring constants of cantilevers using an indentation instrument with an integrated optical microscope. An uncertainty of less than 10% can be achieved for spring constants from 0.1 to 10(2) Nm. The technique makes it possible to measure the spring constant at any desired location on a cantilever of any shape, particularly a...

Standard spring constant calibration methods are compared when applied to higher eigenmodes of cantilevers used in dynamic atomic force microscopy (dAFM). Analysis shows that Sader's original method (Sader et al 1999 Rev. Sci. Instrum. 70 3967-9), which relies on a priori knowledge of the eigenmode shape, is poorly suited for the calibration of higher eigenmodes. On the other hand, the thermal ...

The analysis of the static deflection of cantilever plates is of fundamental importance in application to the atomic force microscope (AFM). In this paper we present a detailed theoretical study of the deflection of such cantilevers. This~ shall incorporate the presentation of approximate analytical methods applicable in the analysis of arbitrary cantilevers, and a discussion of their limitatio...