A micro-electro-mechanical system (MEMS) is a technology that allows obtaining components between 1 to 1000 micrometers (usually 20 micrometers). Its small dimension and, at the same time, the low power consumption, has become the most important features so as to develop a new technology for nano-scale components. Moreover, the fabrication procedures are as simple as a Microstrip line procedure...

As micro-device application in consumer and commercial products develops, efficient tools are required to simulate device dynamics and assess structural performance. An integrated methodology is developed for studying the dynamics of thin film bifurcating structures. Results are presented for a generic thin film structure, which exhibit classical electro-mechanical hysteresis. Such structures c...

In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...

This paper signifies a very basic design and simulation techniques of RF MEMS switches using the advanced design systems software tool (ADS).Micro electro mechanical systems are recent development technologies which has better characteristics performance and also operating at microwave range of frequencies. Fundamentally MEMS switches can be categorized into two types series switches (ohmic typ...

Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplifie...

Three-axis-magnetometers (TAMs) are widely utilized as a key component of attitude determination subsystems and as such are considered the corner stone of navigation for low Earth orbiting (LEO) space systems. Precise geomagnetic-based navigation demands accurate calibration of the magnetometers. In this regard, a complete online calibration process of TAM is developed in the current research t...

In this paper, a methodology is proposed for expediting the coupled electro-mechanical finite element modeling of electrostatically actuated MEMS. The proposed methodology eliminates the need for repeated finite element meshing and subsequent electrostatic modeling of the device during mechanical deformation. We achieve this by using an approximation of the charge density on the movable electro...

The diffusion of micro electro-mechanical systems (MEMS) technology applied to navigation systems is rapidly increasing, but currently, there is a lack of knowledge about the reliability of this typology of devices, representing a serious limitation to their use in aerospace vehicles and other fields with medium and high requirements. In this paper, a reliability testing procedure for inertial ...

The purpose of this study is a discussion on the multifaceted utilization indoor positioning systems such as building facility control, use situation grasping, and operational analysis in offices. Thermopile human sensors have been come into practical by MEMS (Micro Electro Mechanical Systems) technology are becoming widespread. In report, accuracy presence / absence count detection for thermop...

Micro-electro-mechanical systems (MEMS) represent a very important class of systems having applications ranging from small embedded sensors and actuators, passive components in RF and microwave fields, and micro-mirrors in the optical range. The importance of MEMS stems from their many advantages, among which are, their small compact size amendable to integration with other components, low loss...